溶胶-凝胶法制备SiO2减反膜研究

doi:10.3969/j.issn.1001-1803.2023.02.012

摘要/Abstract

摘要：

抗反射涂层（减反膜）在军事、日常生活、工业等各领域有广泛应用。特别是对高能激光系统（惯性约束核聚变至关重要的技术之一）有重要意义。文章分析了减反膜的光学原理，介绍了其常用制造材料二氧化硅（SiO₂）的特性。论述了溶胶-凝胶法制备减反膜的原理及独特优点，描述溶胶-凝胶法镀制减反膜的过程，即通过反应制得SiO₂前驱待镀膜溶胶，再经由浸涂、旋涂、喷涂与涂布等方式镀制减反膜。分析了前体溶胶中各种化学反应过程，及反应中各因素对SiO₂材料和最终镀制减反膜的影响。最后叙述了溶胶-凝胶法制备减反膜的新进展，如向溶胶中加入添加剂、改造待镀膜材料以及与其他制备减反膜的方法联合改性等方法。这样制得的减反膜不仅增强了膜的光学性能还使之具有了如自清洁等功能。最后展望了其在光伏、LED照明与多种前沿技术领域的应用。

关键词: 溶胶-凝胶, 纳米技术, 二氧化硅, 化学过程, 减反膜

Abstract:

Antireflection film （antireflective coating） has been widely used in military applications, daily life, industry, etc., especially in high-energy laser systems （one of the most important technologies for inertial confinement fusion）. In this paper, the optical principle of antireflective coating was analyzed, and the characteristics of its common manufacturing material silica （SiO₂） were introduced. The principle and unique advantages of the antireflective coating prepared by the sol-gel method were described. The process of sol-gel plating antireflective coating was described. The precursor SiO₂ sol was prepared by reaction, and then the antireflective coating was made by dip coating, spin coating, spraying, and coating. Various chemical reactions in the precursor sol were analyzed. The effects of various factors of reactions on the SiO₂ material and the antireflective coating prepared from it were analyzed. Finally, the new research progress in the preparation of antireflective coatings by sol-gel method was reviewed, such as adding additives to the sol, modifying the materials to be coated, and combining with other methods to prepare the antireflective coatings. The antireflective coatings prepared by those methods not only enhance the optical properties of the film but also have functions such as self-cleaning function. Their wide applications in a variety of cutting-edge fields of technology, e.g., in photovoltaic industry, LED lighting, etc., were also prospected.

Key words: sol-gel, nanotechnology, silica, chemical process, antireflective coating

中图分类号:

O648.16

井希明,盛永刚. 溶胶-凝胶法制备SiO₂减反膜研究[J]. 日用化学工业（中英文）, 2023, 53(2): 210-219.

Jing Ximing,Sheng Yonggang. Preparation of SiO₂ antireflective coatings by sol-gel method[J]. China Surfactant Detergent & Cosmetics, 2023, 53(2): 210-219.

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溶胶-凝胶法制备SiO₂减反膜研究

Preparation of SiO₂ antireflective coatings by sol-gel method

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