溶胶-凝胶法制备SiO2减反膜研究

doi:10.3969/j.issn.1001-1803.2023.02.012

Abstract

Abstract:

Antireflection film （antireflective coating） has been widely used in military applications, daily life, industry, etc., especially in high-energy laser systems （one of the most important technologies for inertial confinement fusion）. In this paper, the optical principle of antireflective coating was analyzed, and the characteristics of its common manufacturing material silica （SiO₂） were introduced. The principle and unique advantages of the antireflective coating prepared by the sol-gel method were described. The process of sol-gel plating antireflective coating was described. The precursor SiO₂ sol was prepared by reaction, and then the antireflective coating was made by dip coating, spin coating, spraying, and coating. Various chemical reactions in the precursor sol were analyzed. The effects of various factors of reactions on the SiO₂ material and the antireflective coating prepared from it were analyzed. Finally, the new research progress in the preparation of antireflective coatings by sol-gel method was reviewed, such as adding additives to the sol, modifying the materials to be coated, and combining with other methods to prepare the antireflective coatings. The antireflective coatings prepared by those methods not only enhance the optical properties of the film but also have functions such as self-cleaning function. Their wide applications in a variety of cutting-edge fields of technology, e.g., in photovoltaic industry, LED lighting, etc., were also prospected.

Key words: sol-gel, nanotechnology, silica, chemical process, antireflective coating

CLC Number:

O648.16

Jing Ximing,Sheng Yonggang. Preparation of SiO₂ antireflective coatings by sol-gel method[J].China Surfactant Detergent & Cosmetics, 2023, 53(2): 210-219.

Figures/Tables 8

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References 50

[1]	Zou Caineng, He Dongbo, Jia Chengye, et al. Connotation and pathway of world energy transition and its significance for carbon neutral[J]. Acta Petrolei Sinica, 2021, 42 (2):233-247. doi: 10.7623/syxb202102008
[2]	Huang C, Li L. Magnetic confinement fusion: a brief review[J]. Frontiers in Energy, 2018, 12 (2):305-313. doi: 10.1007/s11708-018-0539-1
[3]	Li Zhichao, Zhao Hang, Gong Tao, et al. Recent research progress of optical Thomson scattering in laser-driven inertial confinement fusion[J]. High Power Laser and Particle Beams, 2020, 32 (9):56-69.
[4]	Campbell J H, Hawley-Fedder R A, Stolz C J, et al. NIF optical materials and fabrication technologies: an overview[C]// SPIE. Optical Engineering at the Lawrence Livermore National Laboratory Ⅱ:The National Ignition Facility. USA: SPIE, 2004.
[5]	Sun X, Xu X, Song G, et al. Preparation of MgF₂/SiO₂ coating with broadband antireflective coating by using sol-gel combined with electron beam evaporation[J]. Optical Materials, 2020, 101: 109739. doi: 10.1016/j.optmat.2020.109739
[6]	Xu Juan, Liu Yongsheng, Lei Wei, et al. Research progress of multifunctional antireflection coatings on solar cells[J]. Bulletin of the Chinese Ceramic Society, 2015, 34 (2):428-432.
[7]	Starke R, Schober G A H. Why history matters: Ab initio rederivation of Fresnel equations confirms microscopic theory of refractive index[J]. Optik, 2018, 157: 275-286. doi: 10.1016/j.ijleo.2017.11.026
[8]	Zhang Jinzhong. Stokes’s treatment of reflection and its application[J]. Journal of Shandong University(Philosophy and Social Sciences), 1956 (2):71-77.
[9]	Xu S H, Huang J Y, Fei G T, et al. Sol-Gel preparation of high transmittance of infrared antireflective coating for TeO₂ crystals[J]. Infrared Physics & Technology, 2021, 118: 103881.
[10]	Hossain M I, Aïssa B, Samara A, et al. Hydrophilic antireflection and antidust silica coatings[J]. ACS Omega, 2021, 6 (8):5276-5286. doi: 10.1021/acsomega.0c05405 pmid: 33681568
[11]	Motamedi M, Warkiani M E, Taylor R A. Transparent surfaces inspired by nature[J]. Advanced Optical Materials, 2018, 6 (14):1800091. doi: 10.1002/adom.201800091
[12]	Gallais L, Commandré M. Laser-induced damage thresholds of bulk and coating optical materials at 1 030 nm, 500 fs[J]. Applied Optics, 2014, 53 (4):A186-A196.
[13]	Gu Y, Xia K, Wu D, et al. Technical characteristics and wear-resistant mechanism of nano coatings: a review[J]. Coatings (Basel), 2020, 10 (3):233.
[14]	Wang X, Shen J. A review of contamination-resistant antireflective sol-gel coatings[J]. Journal of Sol-Gel Science and Technology, 2012, 61 (1):206-212. doi: 10.1007/s10971-011-2615-4
[15]	Lobmann P. Sol-Gel processing of MgF₂antireflective coatings[J]. Nanomaterials, 2018, 8 (5):295. doi: 10.3390/nano8050295
[16]	Tao C Y, Zou X S, Reddy K M, et al. A hydrophobic ultralow refractive-index silica coating towards double-layer broadband antireflective coating with exceptionally high vacuum stability and laser-induced damage threshold[J]. Colloids and Surfaces A: Physicochemical and Engineering Aspects, 2019, 563: 340-349. doi: 10.1016/j.colsurfa.2018.11.038
[17]	Li W C, Ma S S, Li S W, et al. The migration behaviors of biochar colloids in heterogeneous porous media[J]. Acta Scientiae Circumstantiae, 2021, 41 (7):2857-2867.
[18]	Wang Q, Wang J, Jiang S, et al. Recent progress in sol-gel method for designing and preparing metallic and alloy nanocrystals[J]. Acta Physico-Chimica Sinica, 2019, 35 (11):1186-1206. doi: 10.3866/PKU.WHXB201902002
[19]	Liu Xianzhe, Zhang Xu, Tao Hong, et al. Research progress of tin oxide-based thin films and thin-film transistors prepared by sol-gel method[J]. Acta Physica Sinica, 2020, 69 (22):248-263.
[20]	Hench L L, West J K. The sol-gel process[J]. Chemical Reviews, 1990, 90 (1):33-72. doi: 10.1021/cr00099a003
[21]	Stöber W, Fink A, Bohn E. Controlled growth of monodisperse silica spheres in the micron size range[J]. Academic Press, 1968, 26 (1):62-69.
[22]	Vincent A, Babu S, Brinley E, et al. Role of catalyst on refractive index tunability of porous silica antireflective coatings by sol-gel technique[J]. The Journal of Physical Chemistry C, 2007, 111 (23):8291-8298. doi: 10.1021/jp0700736
[23]	Karmakar B, De G, Ganguli D. Dense silica microspheres from organic and inorganic acid hydrolysis of TEOS[J]. Journal of Non-crystalline Solids, 2000, 272 (2):119-126. doi: 10.1016/S0022-3093(00)00231-3
[24]	Brinker C J. Hydrolysis and condensation of silicates: Effects on structure[J]. Journal of Non-Crystalline Solids, 1988, 100 (1-3):31-50. doi: 10.1016/0022-3093(88)90005-1
[25]	Erigoni A, Diaz U. Porous silica-based organic-inorganic hybrid catalysts: a review[J]. Catalysts, 2021, 11 (79):79. doi: 10.3390/catal11010079
[26]	Zhang Zhihui, He Junhui, Yang Qiaowen. Research progress in preparation of mechanically durable SiO₂ antireflective coatings by acid catalyzed sol-gel process[J]. Imaging Science and Photochemistry, 2013, 31 (2):91-102. doi: 10.7517/j.issn.1674-0475.2013.02.002
[27]	Curley R, Holmes J D, Flynn E J. Can sustainable, monodisperse, spherical silica be produced from biomolecules? A review[J]. Applied Nanoscience, 2021, 11 (6):1777-1804. doi: 10.1007/s13204-021-01869-6
[28]	Trinh T T, Jansen A P J, van Santen R A. Mechanism of oligomerization reactions of silica[J]. The Journal of Physical Chemistry B, 2006, 110 (46):23099-23106. doi: 10.1021/jp063670l
[29]	Yokoi T, Wakabayashi J, Otsuka Y, et al. Mechanism of formation of uniform-sized silica nanospheres catalyzed by basic amino acids[J]. Chemistry of Materials, 2009, 21 (15):3719-3729. doi: 10.1021/cm900993b
[30]	Winter R, Chan J B, Frattini R, et al. The effect of fluoride on the sol-gel process[J]. Journal of Non-Crystalline Solids, 1988, 105 (3):214-222. doi: 10.1016/0022-3093(88)90310-9
[31]	Xia B, Yan L, Li Y, et al. Preparation of silica coatings with continuously adjustable refractive indices and wettability properties via sol-gel method[J]. RSC Advances, 2018, 8 (11):6091-6098. doi: 10.1039/C7RA12817G
[32]	Gao W, Rigout M, Owens H. Facile control of silica nanoparticles using a novel solvent varying method for the fabrication of artificial opal photonic crystals[J]. Journal of Nanoparticle Research: an Interdisciplinary Forum for Nanoscale Science and Technology, 2016, 18 (12):1-10.
[33]	Qi D, Lin C, Zhao H, et al. Size regulation and prediction of the SiO₂ nanoparticles prepared via Stöber process[J]. Journal of Dispersion Science and Technology, 2017, 38 (1):70-74. doi: 10.1080/01932691.2016.1143373
[34]	Aziz F, Ismail A F. Spray coating methods for polymer solar cells fabrication: A review[J]. Materials Science in Semiconductor Processing, 2015, 39: 416-425. doi: 10.1016/j.mssp.2015.05.019
[35]	Falcony C, Aguilar-Frutis M A, García-Hipólito M. Spray pyrolysis technique; high-k dielectric films and luminescent materials: a review: micromachines[J]. Micromachines, 2018, 9 (8):144. doi: 10.3390/mi9040144
[36]	Mozumder M S, Mourad A I, Pervez H, et al. Recent developments in multifunctional coatings for solar panel applications: A review[J]. Solar Energy Materials and Solar Cells, 2019, 189: 75-102. doi: 10.1016/j.solmat.2018.09.015
[37]	Shen Bin, Xiong Huai, Zhang Xu, et al. Porous silica antireflective film at ultraviolet laser wavelength (266 nm)[J]. Acta Optica Sinica, 2020, 40 (22):170-176.
[38]	Qin Ruirui, Xu Wencai, Chen Bangshe, et al. Progress of coating technology[J]. Packaging Engineering, 2012, 33 (3):132-136.
[39]	Hu Yan, Wang Yuanhao, Yang Hongxing. TEOS/silane coupling agent composed double layers structure: A novel super-hydrophilic coating with controllable water contact angle value[J]. Applied Energy, 2017, 185: 2209-2216. doi: 10.1016/j.apenergy.2015.09.097
[40]	Zhang Y, Zhang X, Ye H, et al. A simple route to prepare crack-free thick antireflective silica coatings with improved antireflective stability[J]. Materials Letters, 2012, 69: 86-88. doi: 10.1016/j.matlet.2011.11.043
[41]	Cai S, Zhang Y, Zhang H, et al. Sol-Gel preparation of hydrophobic silica antireflective coatings with low refractive index by base/acid two-step catalysis[J]. ACS Applied Materials & Interfaces, 2014, 6 (14):11470-11475.
[42]	Sun X, Li L, Xu X, et al. Preparation of hydrophobic SiO₂/PTFE sol and antireflective coatings for solar glass cover[J]. Optik, 2020, 212: 164704. doi: 10.1016/j.ijleo.2020.164704
[43]	Zhang X L, Lu Q, Cheng Y, et al. Moth-eye-like antireflection coatings based on close-packed solid/hollow silica nanospheres[J]. Journal of Sol-Gel Science and Technology, 2019, 90 (2):330-338. doi: 10.1007/s10971-018-04912-1
[44]	Nakashima Y, Takai C, Razavi-Khosroshahi H, et al. Influence of the PAA concentration on PAA/NH3 emulsion template method for synthesizing hollow silica nanoparticles[J]. Colloids and Surfaces A: Physicochemical and Engineering Aspects, 2018, 546: 301-306. doi: 10.1016/j.colsurfa.2018.03.033
[45]	Muraguchi R, Futagami W, Hakoshima Y, et al. Preparation and properties of organic-inorganic hybrid antireflection films made by a low-temperature process using hollow silica nanoparticles[J]. ACS Omega, 2021, 6 (12):8570-8577. doi: 10.1021/acsomega.1c00386 pmid: 33817517
[46]	Yuan Y, Lu X D, Yan G H, et al. Sol-gel preparation of antireflective coatings with abrasion resistance by base/acid double catalysis and surface treatment[J]. Solar Energy, 2017, 155: 1366-1372. doi: 10.1016/j.solener.2017.08.003
[47]	Wang X, Nshimiyimana J P, Huang D, et al. Durable superhydrophilic and antireflective coating for high-performance anti-dust photovoltaic systems[J]. Applied Nanoscience, 2021, 11 (3):875-885. doi: 10.1007/s13204-020-01643-0
[48]	Zhu Y, Chen L, Zhang C, et al. Preparation of hydrophobic antireflective SiO₂ coating with deposition of PDMS from water-based SiO₂-PEG sol[J]. Applied Surface Science, 2018, 457: 522-528. doi: 10.1016/j.apsusc.2018.06.177
[49]	Zhang S, Zhao X, Wang P, et al. Preparation of superhydrophilic silicate coating by sol-gel for double-wavelength broadband antireflective coatings[J]. Journal of Sol-Gel Science and Technology, 2019, 92 (3):598-606. doi: 10.1007/s10971-019-05130-z
[50]	Mbam S O, Nwonu S E, Orelaja O A, et al. Thin-film coating; historical evolution, conventional deposition technologies, stress-state micro/nano-level measurement/models and prospects projection: a critical review[J]. Materials Research Express, 2019, 6 (12):122001. doi: 10.1088/2053-1591/ab52cd

Preparation of SiO₂ antireflective coatings by sol-gel method

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Preparation of SiO2 antireflective coatings by sol-gel method

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Preparation of SiO₂ antireflective coatings by sol-gel method